Séminaire donné par le Pr Mitsunori Toyoda (Tokyo Polytechnic University et Professeur invité au LCF)

Séminaire donné par le Pr Mitsunori Toyoda (Tokyo Polytechnic University et Professeur invité au LCF) le Jeudi 10 Novembre 2022 à 13H15 dans l'auditorium de l'Institut d'Optique de Palaiseau, sur le thème : "Diffraction-limited imaging by extreme ultraviolet multilayer mirror objective and its application to staining-free observation of polymer blend samples".

Résumé : "An imaging system made of reflective multilayer mirrors in extreme ultraviolet (EUV) region can provide both a large numerical aperture and good correction of off-axis aberration yielding a bright full-field image with high spatial resolution in a wide field of view. We will introduce the research results of the EUV microscope installed at the NewSUBARU synchrotron facility, where we review highlight data of diffraction-limited imaging on lithography mask observation in a wavelength of 13.5 nm. We also report staining-free observation of polymer blend samples by applying a laboratory-scale transmission EUV microscope, where an elemental contrast resulting from transmission difference between oxygen and carbon will be successfully demonstrated."