Seminar given by Pr Mitsunori Toyoda (Tokyo Polytechnic University and Visiting Professor at LCF)

Seminar given by Pr Mitsunori Toyoda (Tokyo Polytechnic University and Visiting Professor at LCF) thursday 10 November 2022 at 1.15pm in the auditorium of the Institut d'Optique in Palaiseau, on the topic: "Diffraction-limited imaging by extreme ultraviolet multilayer mirror objective and its application to staining-free observation of polymer blend samples".

Abstract: "An imaging system made of reflective multilayer mirrors in extreme ultraviolet (EUV) region can provide both a large numerical aperture and good correction of off-axis aberration yielding a bright full-field image with high spatial resolution in a wide field of view. We will introduce the research results of the EUV microscope installed at the NewSUBARU synchrotron facility, where we review highlight data of diffraction-limited imaging on lithography mask observation in a wavelength of 13.5 nm. We also report staining-free observation of polymer blend samples by applying a laboratory-scale transmission EUV microscope, where an elemental contrast resulting from transmission difference between oxygen and carbon will be successfully demonstrated."